MT 196LM Series of Micro Stageshttp://www.steinmeyer.com
Officials at Steinmeyer Inc. announce a new high-precision micro stage, the MT 196LM series. Available in two travel options, of either 100mm or 200mm, the MT196-100-2LM and the MT196-200-2LM are designed for applications in the semiconductor metrology, biomedical, miniature robotics, and laser industry.
The MT196LM has a footprint of 110mm x 196mm, height of 45mm and, depending on which stage you choose, weighs 4.1kig or 4.7kgs. Manufactured from high strength anodized aluminum, this series of table offers a positional accuracy of 2 µm, straightness/flatness runout of +/- 5 µm for 100mm of travel and +/- 10 µm for 200mm of travel with repeatability of +/- 0.2 µm.
- Preloaded cross roller bearings
- Fixed stops
- Incremental linear encoder with 0.1 µm resolution
- Linear piezo motor drive.
This product can be provided as a XY stage without any adapter plate. Ultra high vacuum, clean room, or non-magnetic preparation is available on request.