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MT 196LM Series of Micro Stages

Measurement Systems

http://www.steinmeyer.com

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Steinmeyer Inc. October 5, 2012

Officials at Steinmeyer Inc. announce a new high-precision micro stage, the MT 196LM series. Available in two travel options, of either 100mm or 200mm, the MT196-100-2LM and the MT196-200-2LM are designed for applications in the semiconductor metrology, biomedical, miniature robotics, and laser industry.

The MT196LM has a footprint of 110mm x 196mm, height of 45mm and, depending on which stage you choose, weighs 4.1kig or 4.7kgs.  Manufactured from high strength anodized aluminum, this series of table offers a positional accuracy of 2 µm, straightness/flatness runout of +/- 5 µm for 100mm of travel and +/- 10 µm for 200mm of travel with repeatability of +/- 0.2 µm. 

Features include:

  • Preloaded cross roller bearings
  • Fixed stops
  • Incremental linear encoder with 0.1 µm resolution
  • Linear piezo motor drive.

This product can be provided as a XY stage without any adapter plate.  Ultra high vacuum, clean room, or non-magnetic preparation is available on request.